JPH03112933U - - Google Patents
Info
- Publication number
- JPH03112933U JPH03112933U JP2130990U JP2130990U JPH03112933U JP H03112933 U JPH03112933 U JP H03112933U JP 2130990 U JP2130990 U JP 2130990U JP 2130990 U JP2130990 U JP 2130990U JP H03112933 U JPH03112933 U JP H03112933U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- plate
- gas
- gas flow
- holder
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000872 buffer Substances 0.000 claims description 5
- 230000001105 regulatory effect Effects 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims 1
- 238000009792 diffusion process Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2130990U JPH03112933U (en]) | 1990-03-02 | 1990-03-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2130990U JPH03112933U (en]) | 1990-03-02 | 1990-03-02 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH03112933U true JPH03112933U (en]) | 1991-11-19 |
Family
ID=31524357
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2130990U Pending JPH03112933U (en]) | 1990-03-02 | 1990-03-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH03112933U (en]) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56126784A (en) * | 1980-03-11 | 1981-10-05 | New Japan Radio Co Ltd | Collision preventing device |
| JPS6118941A (ja) * | 1984-05-31 | 1986-01-27 | イーストマン コダック カンパニー | 画像記録要素 |
-
1990
- 1990-03-02 JP JP2130990U patent/JPH03112933U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS56126784A (en) * | 1980-03-11 | 1981-10-05 | New Japan Radio Co Ltd | Collision preventing device |
| JPS6118941A (ja) * | 1984-05-31 | 1986-01-27 | イーストマン コダック カンパニー | 画像記録要素 |
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